PREPARATION OF (Ba0.5Sr0.5)TiO3 THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Journal of Infrared and Millimeter Waves >Volume 20 >Issue 1 >Page 73 > Article

Journal of Infrared and Millimeter Waves
Vol. 20, Issue 1, 73 (2001)

PREPARATION OF (Ba_0.5Sr_0.5)TiO₃ THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS

[in Chinese]¹, [in Chinese]², [in Chinese]³, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. PREPARATION OF (Ba_0.5Sr_0.5)TiO₃ THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS[J]. Journal of Infrared and Millimeter Waves, 2001, 20(1): 73 Copy Citation Text

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Abstract

(Ba_0.5Sr_0.5)TiO₃ ferroelectric thin films were prepared by Sol-Gel processing. Films with thickness of 160nm treated at 700℃ for 1h showed pure perovskite structure and good dielectric, insulating properties, i.e. a dielectric constant of 225, a dielectric loss of 0.04 4, a leakage current density of 8.0×10^－8A/cm². The leakage current density was found to depend on the annealing temperature. The measurement of the J-V characteristics on films indicated the conduction process to be bulk- limited.

Keywords

leakage current.SOL-GEL Ba_0.5Sr_0.5TiO₃ dielectric property

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