[1] SAFRANI A, ABDULHALIM I. Real-time phase shift interference microscopy[J]. Optics Letters, 2014, 39(17): 5220-5223.
[2] JIANG Yi. White light interferometry for the measurement of extrinsic Fabry-Perot interferometry[J]. Acta Photonica Sinica, 2006, 35(3): 381-384.
[4] MA Sen, XIE Fang, WANG Yun-zhi, et al. High precision on-line measurement of step height based on fiber dual-wavelength interferometry[J].Journal of Optoelectronics·Laser, 2014, 25(9): 1749-1753.
[9] RAúL D L F. White light spectral interferometry as a spectrometer calibration tool[J].Applied Spectroscopy, 2014, 68(5): 525-530.
[10] HARASAKI A, SCHMIT J, WYANT J C. Improved vertical-scanning interferometry[J]. Applied Optics, 2000, 39(13): 2107-2115.
[11] GAO Fen, JIANG Zhuang-de, LI Bing, et al. Multi-step phase-shifting algorithm based on extended averaging technique and its error suppression characteristics comparison[J]. Acta Photonica Sinica, 2014, 43(4): 0426001.
[12] ISO 11562-1996, Geometrical product specifications(GPS)-surface texture: profile method-metrological characteristics of phase correct filters[S]. Switzerland: International Organization For Standardization, 1998.
[14] BEMHARD W, ONDREJ H, GERD H. Improved white-light interferometry on rough surfaces by statistically independent speckle patterns[J]. Applied Optics, 2012, 51(6): 751-757.
[15] LAOPORNPICHAYANUWAT W, VISESSAMIT J,TIANPRATEEP M. 3-D surface roughness profile of 316-stainless steel using vertical scanning interferometry with a superluminescent diode[J]. Measurement,2012, 45(10): 2400-2406.