Design and optical performance of 256&#215;256 multi-phase diffractive microlens arrays

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 31 >Issue 3 >Page 253 > Article

Infrared and Laser Engineering
Vol. 31, Issue 3, 253 (2002)

Design and optical performance of 256×256 multi-phase diffractive microlens arrays

[in Chinese]^1、2、*, [in Chinese]¹, [in Chinese]², and [in Chinese]³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

show less

DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and optical performance of 256×256 multi-phase diffractive microlens arrays[J]. Infrared and Laser Engineering, 2002, 31(3): 253 Copy Citation Text

show less

Abstract

The design and fabrication method for diffractive microlens array are studied. Based on the research achievement, 256×256 multi-phase diffractive microlens arrays are manufactured for 3～5 μm wavelength. Point spread function and diffractive efficiency of the designed multi-phase diffractive microlens arrays are measured. The diffractive efficiency of 8-phase and 16-phase quartz diffractive microlens arrays are 80.2% and 87.5% respectively, which suggests that the designed multi-phase diffractive microlens arrays can fulfill practical needs.

Keywords

Diffractive efficiency Diffractive microlens Point spread function Binary optics

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and optical performance of 256×256 multi-phase diffractive microlens arrays[J]. Infrared and Laser Engineering, 2002, 31(3): 253

Download Citation

Tools

Save the article for my favorites

Paper Information