Effect of Material Removal Function on Surface Shape Error Correction in Fluid Jet Polishing

Lü Liang; Ma Ping; Zhu Heng; Huang Jinyong; Wang Gang

doi:10.3788/cjl201643.0416003

[1] Zhang Jian, Dai Lei, Wang Fei, et al.. Restraint of mid-spatial-frequency error aspheric surface by small-tool adaptive polishing[J]. Acta Optica Sinica, 2013, 33(8): 0822002.

[2] Xu Haihua. Research on compensation of computer controlled polishing aspheric surface-shape error[J]. Laser & Optoelectronics Progress, 2014, 51(10): 102204.

[3] Gao Bilie. The mathematical analysis for the active lap deformation on proceeding condition[J]. Acta Optica Sinica, 2005, 25(4): 525- 532.

[4] Zhang Wei, Li Hongyu, Yu Guoyu. Current situation of ultra-precision bonnet polishing key technology of optical elements[J]. Acta Optica Sinica, 2009, 29(1): 27-34.

[5] Li Hongyu, Zhang Wei, Yu Guoyu. Removing characteristics of ultraprecise bonnet polishing on spatial optics elements[J]. Acta Optica Sinica, 2009, 29(3): 811-817.

[6] Dai Yifan, Shi Feng, Peng Xiaoqiang, et al.. Deterministic figuring in optical machining by magnetorheological finishing[J]. Acta Optica Sinica, 2010, 30(1): 198-205.

[7] Yang Zhiqiang, Guo Zhongda, Chen Zhili, et al.. Investigation of magnetorheological finishing method[J]. Journal of Applied Optics, 2009, 30(3): 500-504.

[8] Bai Yang, Zhang Feng, Li Longxiang, et al.. Manufacture of silicon modification layer on silicon carbide surface by magnetorheological finishing[J]. Acta Optica Sinica, 2015, 35(3): 0322007.

[9] Shi Chunyan, Yuan Jiahu, Wu Fan, et al.. Influence analysis of impact angle on material removal profile in fluid jet polishing[J]. Acta Optica Sinica, 2010, 30(2): 513-517.

[10] Shi Chunyan, Yuan Jiahu, Wu Fan, et al.. Research of errors analysis and material removal stability in fluid jet polishing[J]. Acta Optica Sinica, 2011, 31(1): 0112012.

[11] Ma Zhanlong, Liu Jian, Wang Junlin. Material removal mechanism and influence factor of fluid jet polishing[J]. Journal of Applied Optics, 2011, 32(6): 1206-1211.

[12] Fang H, Guo P J, Yu J C. Surface roughness and material removal in fluid jet polishing[J]. Applied Optics, 2006, 45(17): 4012-4019.

[13] Guo P J, Fang H, Yu J C. Edge effect in fluid jet polishing[J]. Applied Optics, 2006, 45(26): 6729-6735.

[14] Kordonski W, Shorey A B, Sekeres A. New magnetically assisted finishing method: Material removal with magnetorheological fluid jet [C]. SPIE, 2003, 5180: 107-114.

[15] Li Z Z, Li S Y, Dai Y F, et al.. Optimization and application of influence function in abrasive jet polishing[J]. Applied Optics, 2010, 49 (15): 2947-2953.

[16] Peng W Q, Guan C L, Li S Y. Material removal mode affected by the particle size in fluid jet polishing[J]. Applied Optics, 2013, 52(33): 7927-7933.

[17] Song X Z, Zhang Y, Zhang F H. Study on removal mechanism of nanoparticle colloid jet machining[J]. Advanced Materials Research, 2008, 53-54: 363-368.

[18] Zhang F H, Song X Z, Zhang Y, et al.. Figuring of an ultra- smooth surface in nanoparticle colloid jet machining[J]. Journal of Micromechanics and Microengineering, 2009, 19: 054009.

[19] Preston F W. The theory and design of plate glass polishing machines[J]. Journal of the Society of Glass Technology, 1927, 11: 214.

[20] Jones R A. Optimization of computer controlled polishing[J]. Applied Optics, 1977, 16(1): 218-224.

[21] Fang H, Guo P J, Yu J. Optimization of the material removal in fluid jet polishing[J]. Optical Engineering, 2006, 45(5): 625-631.

[22] Li Z Z, Wang J M, Peng X Q, et al.. Removal of single point diamond-turning marks by abrasive jet polishing[J]. Applied Optics, 2011, 50(16): 2458-2463.