Bing Han, Ginman Ge, Xinyi Ren, Xiaojun Li, jia Liu, Ming Yan, Heping Zeng. Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb[J]. Chinese Journal of Lasers, 2022, 49(17): 1704001
- Chinese Journal of Lasers
- Vol. 49, Issue 17, 1704001 (2022)
Fig. 1. Double-comb surface shape measuring system. (a) Experimental setup; (b) output spectrum of electro-optical comb
Fig. 2. Time domain characteristics of dual-comb. (a) Time domain dual-comb interferometric sequence; (b) partial enlargement
Fig. 3. Single-cycle dual-comb interferogram
Fig. 4. Test of system stability. (a) Allen deviation; (b) deviation
Fig. 5. Dual-comb measurement result under galvanometer scanning
Fig. 6. Measured signal and reference signal reflected by surface of sample 1
Fig. 7. Surface morphologies of sample 1. (a) 3D topography of antenna sample 1 with physical picture shown in inset; (b) result of surface fitting
Fig. 8. Surface morphologies of sample 2. (a) 3D topography of antenna sample 2 with physical picture shown in inset; (b) result of surface fitting
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