• Chinese Optics Letters
  • Vol. 2, Issue 9, 09520 (2004)
Aijun Zeng, Xiangzhao Wang, Yang Bu, and Dailin Li
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    Aijun Zeng, Xiangzhao Wang, Yang Bu, Dailin Li. Position sensor based on slit imaging[J]. Chinese Optics Letters, 2004, 2(9): 09520 Copy Citation Text show less

    Abstract

    A position sensor based on slit imaging is proposed and its measurement principle is described. An imaging slit is illuminated by a collimated laser beam with square-wave modulation and imaged on a detection double slit through a 4f system. A magnified image of the detection double slit is formed on a bi-cell detector. The position of the imaging slit is obtained by detecting light intensity on two parts of the bi-cell detector. In experiments, the feasibility of the sensor was verified. The repeatability was less than 40 nm.
    Aijun Zeng, Xiangzhao Wang, Yang Bu, Dailin Li. Position sensor based on slit imaging[J]. Chinese Optics Letters, 2004, 2(9): 09520
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