• Optics and Precision Engineering
  • Vol. 29, Issue 11, 2613 (2021)
Wen-rong SI1, Chen-zhao FU1, Jian BU2, He-li NI1..., Hao-yong LI2, Xie-jun WANG2, Deng-feng JU3 and Yi-ting YU2,*|Show fewer author(s)
Author Affiliations
  • 1State Grid Shanghai Electric Power Research Institute, Shanghai200437, China
  • 2Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi’an71007,China
  • 3Global Energy Interconnection Research Institute Co.,Ltd, Beijing102209, China
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    DOI: 10.37188/OPE.20212911.2613 Cite this Article
    Wen-rong SI, Chen-zhao FU, Jian BU, He-li NI, Hao-yong LI, Xie-jun WANG, Deng-feng JU, Yi-ting YU. MEMS fiber optic Fabry-Perot sensors based on porous sensing diaphragms and applications for partial discharge detection[J]. Optics and Precision Engineering, 2021, 29(11): 2613 Copy Citation Text show less
    References

    [1] 1姚维强, 司文荣, 吕佳明, 等. EFPI光纤超声传感器及其潜在局放检测应用综述[J]. 高电压技术, 2020, 46(6): 1855-1866.YAOW Q, SIW R, LÜJ M, et al. Review on EFPI fiber-based ultrasonic sensors and its potentially partial discharge detection application[J]. High Voltage Engineering, 2020, 46(6): 1855-1866.(in Chinese)

    [2] J MA, H F XUAN et al. Fiber-optic Fabry-Pérot acoustic sensor with multilayer graphene diaphragm. IEEE Photonics Technology Letters, 25, 932-935(2013).

    [3] B LIU, J LIN, J WANG et al. MEMS-based high-sensitivity Fabry–Perot acoustic sensor with a 45° angled fiber. IEEE Photonics Technology Letters, 28, 581-584(2016).

    [4] W R SI, C Z FU, D L LI et al. Directional sensitivity of a MEMS-based fiber-optic extrinsic Fabry–Perot ultrasonic sensor for partial discharge detection. Sensors, 18, 1975(2018).

    [5] W ZHANG, P LU, W J NI et al. Gold-diaphragm based Fabry–Perot ultrasonic sensor for partial discharge detection and localization. IEEE Photonics Journal, 12, 1-12(2020).

    [6] C Z FU, W R SI, H Y LI et al. A novel high-performance beam-supported membrane structure with enhanced design flexibility for partial discharge detection. Sensors, 17, 593-604(2017).

    [7] M M YAACOB, M A ALSAEDI, J R RASHED et al. Review on partial discharge detection techniques related to high voltage power equipment using different sensors. Photonic Sensors, 4, 325-337(2014).

    [8] Q WU, Y OKABE. High-sensitivity ultrasonic phase-shifted fiber Bragg grating balanced sensing system. Optics Express, 20, 28353-28362(2012).

    [9] T Z ZHANG, F F PANG, H H LIU et al. A fiber-optic sensor for acoustic emission detection in a high voltage cable system. Sensors, 16, 2026(2016).

    [10] 10陈起超, 赵洪, 张伟超. 外置油腔耦合局放超声非本征光纤法布里-珀罗传感器[J]. 光学 精密工程, 2020, 28(7): 1471-1479. doi: 10.37188/OPE.20202807.1471CHENQ C, ZHAOH, ZHANGW CH. External oil cavity coupled with EFPI partial discharge ultrasonic detection sensor[J]. Opt. Precision Eng., 2020, 28(7): 1471-1479.(in Chinese). doi: 10.37188/OPE.20202807.1471

    [11] 11冯文林, 彭进, 余佳浩, 等. 端面腐蚀的双法布里-珀罗光纤温度传感器[J]. 光学 精密工程, 2019, 27(4): 766-770. doi: 10.3788/ope.20192704.0766FENGW L, PENGJ, YUJ H, et al. Double Fabry-Pérot fiber optic temperature sensor based on end-face corrosion[J]. Opt. Precision Eng., 2019, 27(4): 766-770.(in Chinese). doi: 10.3788/ope.20192704.0766

    [12] 12黄俊, 文溢, 姜飞, 等. 光纤F-P腔传感器特性研究[J]. 传感器与微系统, 2017, 36(4): 68-70. doi: 10.13873/J.1000-9787(2017)04-0068-03HUANGJ, WENY, JIANGF, et al. Research on characteristics of optical fiber F-P cavity sensor[J]. Transducer and Microsystem Technologies, 2017, 36(4): 68-70.(in Chinese). doi: 10.13873/J.1000-9787(2017)04-0068-03

    [13] 13李敏. 液体电介质局放声测的光纤非本征法珀型传感器的研究[D]. 哈尔滨: 哈尔滨理工大学, 2009.LIM. Fiber Extrinsic FP Sensor for Detection of PD-induced Acoustic Emission in Liquid Dielectrics[D]. Harbin: Harbin University of Science and Technology, 2009. (in Chinese)

    [14] 14高超飞, 宋树, 童中宇, 等. 基于EFPI光纤超声传感器的油中局部放电定位[J]. 高压电器, 2019, 55(4): 90-95, 101.GAOCH F, SONGSH, TONGZH Y, et al. Partial discharge location in oil based on EFPI optical fiber ultrasonic sensor[J]. High Voltage Apparatus, 2019, 55(4): 90-95, 101.(in Chinese)

    [15] 15罗勇芬, 李彦明, 刘丽春. 基于超高频和超声波相控接收原理的油中局部放电定位法仿真研究[J]. 电工技术学报, 2004, 19(1): 35-39. doi: 10.3321/j.issn:1000-6753.2004.01.009LUOY F, LIY M, LIUL CH. Simulation of PD location method in oil based on UHF and ultrasonic phased array receiving theory[J]. Transactions of China Electrotechnical Society, 2004, 19(1): 35-39.(in Chinese). doi: 10.3321/j.issn:1000-6753.2004.01.009

    [16] 16王巧云. 光纤法布里-珀罗声波传感器及其应用研究[D]. 大连: 大连理工大学, 2010.WANGQ Y. Study on Fiber Optic Fabrt-Perot Acoustic Sensor and its Application[D]. Dalian: Dalian University of Technology, 2010. (in Chinese)

    Wen-rong SI, Chen-zhao FU, Jian BU, He-li NI, Hao-yong LI, Xie-jun WANG, Deng-feng JU, Yi-ting YU. MEMS fiber optic Fabry-Perot sensors based on porous sensing diaphragms and applications for partial discharge detection[J]. Optics and Precision Engineering, 2021, 29(11): 2613
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