A new method of real-time measuring technology is presented to research on the thermo-physical process of laser-material interaction during laser non-melting processing. The dynamic micro-deformation of the specimen was studied using laser beam reflex amplifier system. The temperature distribution on the heat zone side was measured with the thermovision Infrared System. The microstructure in the cross section of heated region center was analyzed. Experimental results show that the final deformation is identified to be a result of thermal strain and phase transformation strain and at the same time the temperature distribution on the heat zone side is revealed. The conclusion is helpful to application research of laser non-melting processing further.