Xu-liang SU, Can WANG, Lei-ying YING, Huan XU, Rong-bin XU, Yang MEI, Zhi-wei ZHENG, Hao LONG, Bao-ping ZHANG. Research on Auto-split GaN-based Vertical Structure LED[J]. Acta Photonica Sinica, 2020, 49(12): 27
- Acta Photonica Sinica
- Vol. 49, Issue 12, 27 (2020)
Fig. 1. Process flow of GaN-based auto-split vertical structure LED
Fig. 2. Morphology of mushroom copper substrute
Fig. 3. Surface morphology after polishing
Fig. 4. Performance comparison of LED -Ⅰ and LED -Ⅱ
Fig. 5. Performance comparison of LED-Ⅱ and LED-Ⅲ
Fig. 6. Performance comparison of LED-Ⅲ and LED-Ⅳ
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Table 1. Four different LED structures
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