Jiashun ZHANG, Junming AN, Bingli SUN, Jun CHEN, Yanzhang HU, Chongxin SHAN. Fabrication of Silica Based Silicon 20 Channel Cyclic Arrayed Waveguide Grating[J]. Acta Photonica Sinica, 2022, 51(6): 0623003

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- Acta Photonica Sinica
- Vol. 51, Issue 6, 0623003 (2022)

Fig. 1. Schematic structure of arrayed waveguide grating

Fig. 2. The diagram of 1×20 cyclic AWG

Fig. 3. The diagram of 2×20 cyclic AWG

Fig. 4. Schematic structure of input waveguide

Fig. 5. Simulated spectra of different exponential tapered waveguide widths

Fig. 6. Simulated spectra of 1×20 cyclic AWG

Fig. 7. Center wavelength offset of 1×20 cyclic AWG

Fig. 8. Simulated spectra of 2×20 cyclic AWG

Fig. 9. Center wavelength offset of 2×20 cyclic AWG

Fig. 10. The layout of 2×20 cyclic AWG

Fig. 11. AWG microscope photo and cross section SEM photo

Fig. 12. Photo of 20 channel cyclic AWG athermal module

Fig. 13. Test spectrum of 20 channel cyclic AWG athermal module

Fig. 14. Test center wavelength offset of 20 channel cyclic AWG athermal module
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Table 1. 20 Ch WDM system center frequency
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Table 2. Design geometric parameters of 1×20 cyclic AWG
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Table 3. Design geometric parameters of 2×20 cyclic AWG

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