• Chinese Journal of Lasers
  • Vol. 36, Issue 3, 746 (2009)
Tang Xiaojun1、*, Li Yujun1、2, Liu Junhua1, and Liang Kun3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Tang Xiaojun, Li Yujun, Liu Junhua, Liang Kun. Alignment and Micro-Displace Measurement with Four-Quadrant Photo-Detector by System Modeling[J]. Chinese Journal of Lasers, 2009, 36(3): 746 Copy Citation Text show less
    References

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    [2] Shi Weijie, Wang Xiangzhao, Zhang Dongqing et al.. In-situ measurement method of dense-line depth of focus of a lithographic projection system[J]. Chinese J. of Lasers, 2006,33(1):85~90

    [3] Shi Weijie, Wang Xiangzhao, Zhang Dongqing et al..An in-situ method for measuring the overlay peformance of a lithographic system with mirror-symmetry FOCAL marks[J].Acta Optica Sinica, 2006, 26(3):398~402

    [4] Guo Dongmei, Tan Suqing, Wang Ming. Analysis of micro-displacement measurement accuracy in self-mixing interferometer based on sinusoidal phase modulating technique[J]. Acta Optica Sinica, 2006, 26(6):845~850

    [5] Wang Xiuqing, Xu De, Tan Min et al.. A novel alignment method based on the four-quadrant photo electric detector[J]. Transducer and Microsystem Technologies, 2006, 25(7):11~14

    [6] Yin Xianhua, Zhu Jianqiang, Zu Jifeng et al.. Calculation of induced refraction index in heat capacity slab laser[J]. Chinese J. Lasers, 2008,35(2):225~230

    [7] L. Costa, I. Figueiredo, R. Leal. Modeling and numerical study of actuator and sensor effects for a laminated piezoelectric plate[J].Computers and Structures, 2007, 85:385~403

    [8] Zou Haofei, Xia Guoping, Yang Fangting. A neural network model based on the multi-stage optimization approach for short-term food price forecasting in China[J]. Expert Systems with Applications, 2007, 33:347~356

    [9] Tang Xiaojun, Liu Junhua, Dang Liping et al.. Mathematic model of ray-path of four-quadrant photoelectric detector[J]. Chinese J. Lasers, 2004, 31(4):421~426

    [10] Tang Xiaojun, Liu Junhua, Dang Liping et al.. Anti-model of ray-path for four quadrant photoelectric detector[J]. Chinese J. Lasers, 2004, 31(5):617~620

    [11] Xiaojun Tang, Junhua Liu. Method of auto-revising the conversion coefficients of four-quadrant photodetector[J]. WSEAS Transaction on Elcetronics, 2004, 1(1):17~22

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    Tang Xiaojun, Li Yujun, Liu Junhua, Liang Kun. Alignment and Micro-Displace Measurement with Four-Quadrant Photo-Detector by System Modeling[J]. Chinese Journal of Lasers, 2009, 36(3): 746
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