Characterization of CaF2 Substrates for ArF Excimer Laser

Deng Wenyuan; Jin Chunshui; Jin Jingcheng

doi:10.3788/cjl201138.1002004

[1] D. Basting, G. Marowsky eds. Excimer Laser Technology［M］. Berlin: Springer, 2005

[2] Koji Kakizaki, Yoichi Sasaki, Toyoharu Inoue. High-repetition-rate, 6 kHz and long-pulse-duration, 50 ns ArF excimer laser for sub-65 nm lithography［J］. Rev. Sci. Instrum., 2006, 77(3): 035109

[3] Yu Yinshan, You Libing, Liang Xu et al.. Progress of excimer lasers technology［J］. Chinese J. Lasers, 2010, 37(9): 2253～2270

[4] N. Komine, S. Sakuma, M. Shiozawa et al.. Influence of sodium impurities on ArF excimer-laser-induced absorption in CaF2 crystals［J］. Appl. Opt., 2000, 39(22): 3925～3930

[5] Su Liangbi, Dong Yongjun, Yang Weiqiao et al.. Crystal growth and optical properties of calcium fluoride［J］. Journal of Synthetic Crystals, 2004, 33(1): 88～91

[6] Zhang Haibo, Lou Qihong, Zhou Jun et al.. ArF excimer laser line narrowing technique［J］. Laser & Optoelectronics Progress, 2009, 46(12): 46～51

[7] Lou Qihong, Xu Jianqiu, Luo Shan. Resistance to laser radiation of optical materials and films for ArF and KrF excimer lasers［J］. Laser & Optoelectronics Progress, 1997, 34(5): 9～15

[8] Ch. Mühliga, W. Triebel, D. Keutel et al.. Investigating the ArF laser stability of CaF2 at elevated fluencies［C］. SPIE, 2005, 5878: 58780E

[9] C. R. Clar, M. J. Dejneka, R. L. Maier et al.. Extended Lifetime Excimer Laser Optics［P］. US Patent 7,242,843, 2007

[10] M. Mizuguchi, H. Hosono, H. Kawazoe et al.. Generation of optical absorption bands in CaF2 single crystals by ArF excimer laser irradiation: effect of yttrium impurity［C］. J. Vac. Sci. Technol. A, 1998, 16(5): 3052～3057

[11] V. Liberman, M. Rothschild, J. H. C. Sedlacek et al.. Excimer-laser-induced degradation of fused silica and calcium fluoride for 193-nm lithographic applications［J］. Opt. Lett., 1999, 24(1): 58～60

[12] J. Kohli, B. Rosch, G. Kohnke. CaF2 Today［R］. SPIE conference (Santa Clara), 2003

[13] N. Beermann, H. Blaschke, H. Ehlers et al.. Long term tests of resonator optics in ArF excimer lasers［C］. SPIE, 2008, 7131: 713117

[14] Michael Bauer, Martin Bischoff, Sigrid Jukresch. Exterior surface damage of calcium fluoride out coupling mirrors for DUV lasers［J］. Opt. Experss, 2009, 17(10): 8253～8263

[15] A. Duparre, R. Thielsch, N. Kaiser et al.. Surface finish and optical quality of CaF2 for UV lithography applications［C］. SPIE, 1998, 3334: 1048～1054

[16] H. Johansen, G. Kastner. Surface quality and laser-damage behaviour of chemo-mechanically polished CaF2 single crystals characterized by scanning electron microscopy［J］. J. Mater. Sci., 1998, 33(15): 3839～3848

[17] V. Liberman, M. Rothschild, J. H. Sedlacek et al.. Testing of optical materials for 193 nm applications［C］. SPIE, 1998, 3427: 411～418

[18] Ch. Mühlig, W. Triebel, G. Tpfer et al.. Calcium fluoride for ArF laser lithography-characterization by in situ transmission and LIF measurements［C］. SPIE, 2003, 4932: 458～466

[19] A. Duparré, J. Ferre-Borrull, S. Gliech et al.. Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components［J］. Appl. Opt., 2002, 41(1): 154～171

[20] Sven Schrder, Stefan Gliech, Angela Duparré. Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions［J］. Appl. Opt., 2005, 44(29): 6093～6107

[21] M. Mizuguchi, H. Hosono, H. Kawazoe et al.. Time-resolved photoluminescence for diagnosis of resistance to ArF excimer laser damage to CaF2 single crystals［J］. J. Opt. Soc. Am. B, 1999, 16(7): 1153～1159

[22] Masahiro Katoh, Nobuaki Olamp, Toshihide Horikawa et al.. FTIR study on molecular contamination on surface of optical materials［J］. International Journal of Modern Physics B, 2006, 20(25-27): 3860～3865

[23] Liangbi Su, Jun Xu, Weiqiao Yang et al.. Raman spectra of undoped and uranium doped CaF2 single crystals［J］. Chin. Opt. Lett., 2005, 3(4): 219～221

[24] National Institute of Advanced Industrial Science and Technology. Raman Spectra Database of Minerals and Inorganic Materials (RASMIN)［DL］. http://riodb. ibase. aist. go. jp/rasmin/

[25] M. Schlesinger, P. W. Whippey. Investigations of 4f5d transitions of Ce3+ in CaF2［J］. Phys. Rev., 1968, 171(2): 361～364