Hanlin ZHANG, Rongzhu ZHANG. Defocusing error correction method based on error extraction algorithm assisted installation and adjustment[J]. Journal of Applied Optics, 2024, 45(6): 1245
- Journal of Applied Optics
- Vol. 45, Issue 6, 1245 (2024)
Fig. 1. Optical path diagram of phase-shift interference detection
Fig. 2. Schematic diagram of wavefront defocus
Fig. 3. Interferograms corresponding to different defocusing amount
Fig. 4. Unwrapping phase diagrams corresponding to different NA
Fig. 5. Flow chart of defocusing error correction
Fig. 6. Results diagram of each step of calibration algorithm
Fig. 7. Comparison between original and measured values of defocusing errors
Fig. 8. Final correction accuracy diagram for different defocusing amount
Fig. 9. Experimental interference fringe patterns
Fig. 10. Fitting diagram of wavefront aberration after auxiliary installation and adjustment
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