• Chinese Journal of Lasers
  • Vol. 39, Issue 11, 1107001 (2012)
Luo Haihan*, Li Yaopeng, Cai Qingyuan, and Liu Dingquan
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/cjl201239.1107001 Cite this Article Set citation alerts
    Luo Haihan, Li Yaopeng, Cai Qingyuan, Liu Dingquan. Fabrication of 8-Channel Micro Integrated Filter in 2.0~2.4 μm by Combine Masks and Plating[J]. Chinese Journal of Lasers, 2012, 39(11): 1107001 Copy Citation Text show less

    Abstract

    Using the method to combine masks and plating the spacer layer of the Fabry-Perot filter, germanium and silicon oxide are selected as the high and low index coating materials, 8-channel integrated filter is designed and fabricated with an effective light-transmitting width of 450 μm separated by a block of 30 μm for each channel in the spectral regions of 2.0~2.4 μm. For each channel, the maximum transmittance is greater than 65%, the full width at half maximum (FWHM) is 8~13 nm, as well as, the relative bandwidth is between 0.33%~0.65%.
    Luo Haihan, Li Yaopeng, Cai Qingyuan, Liu Dingquan. Fabrication of 8-Channel Micro Integrated Filter in 2.0~2.4 μm by Combine Masks and Plating[J]. Chinese Journal of Lasers, 2012, 39(11): 1107001
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