Experimental Study on Fixing the Origin of Polar Coordinate Laser Writing Systems

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

[1] Freimann R. Aberrations of axially symmetric diffractive optical elements in relation to their fabrication inaccuracies.Optik, 2000,111(11):485～492

[2] Chang Yuchun,Burge J.Error analysis for CGH optical testing.Proc SPIE,1999,3782:358～366

[3] Poleshchuk A, Korolkov V, Cherkashin V,et al.Polar coordinate laser writing systems:error analysis of fabricated DOEs.Proc SPIE,2001,4440:161～172

[4] Goltsos W,Liu S. Polar coordinate laser writer for binary optics fabrication.Proc SPIE,1990,1211:137～147

[5] Vernold C L,Milster T D. Non-photolithographic fabrication of large computer-generated diffractive optical elements.Proc SPIE, 1994,2263:125～133

[6] Koronkevich V P, Kiriyanov V P, Korol′kov V P, et al. Fabrication of diffractive optical elements by direct laser writing with circular scanning.Proc SPIE, 1994,2363:290～297

[7] Milster T D, Vernold C L. Technique for aligning optical and mechanical axes based on a rotating linear grating.Opt Eng, 1995,34(10):2840～2844

[8] Li Fengyou, Lu Zhenwu, Xie Yongjun,et al.Laser direct writing system with cartesian and polar coordinate.Acta Photonica Sinica,2002,31(5):616～619