[1] JIANG Ye, SHEN Hong-lie, YUE Zhi-hao, et al. Research progress of the back silicon and black silicon solar cells［J］. Journal of Synthetic Crystals, 2012, (S1): 254-259.

[2] HER Tsing-hua, FINLAY R J, WU C, et al. Microstructuring of silicon with femtosecond laser pulses［J］. Applied Physics Letters, 1998, 73(12): 1673-1675.

[3] PENG Kui-qing, LU A, ZHANG R, et al. Motility of metal nanoparticles in silicon and induced anisotropic silicon etching［J］. Advanced Functional Materials, 2008, 18(19): 3026-3035.

[4] YU Dong, WANG Shen, LI li, et al. One-step Cu-assisted chemical etching on polycrystalline silicon［J］. Micronanoelectronic Technology, 2014, 51(004): 249-256.

[5] LIN Long, DENG Zhen-bo, LIU Xian-de. Improvement of Ag NPs to the performance of polymer solar cells［J］. Chinese Journal of Luminescence, 2015, 36(4): 449-453.

[6] CHEN Yun-long, ZHENG Jian-jin, JIANG Yu-hong. Optical performance improving of organic film solar cell by multiple surface coating［J］. Chinese Journal of Luminescence, 2014, 35(6): 710-716.

[7] BAI Yu, GUO Xiao-yang, LIU Xing-yuan. Theoretical study on the improvement of light absorption efficiency of organic solar cells by moth eye structure［J］. Chinese Journal of Luminescence, 2015, 36(5): 539-544.

[8] OH J, BRANZ H M, YUAN H C. An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures［J］. Nature Nanotechnology, 2012, 7(11): 743-748.

[9] CHEN H Y, LU H L, REN Q H, et al. Enhanced photovoltaic performance of inverted pyramid-based nanostructured black-silicon solar cells passivated by an atomic-layer-deposited Al2O3 layer［J］. Nanoscale, 2015, 7(37): 15142-15148.

[10] YE Xiao-yan, ZOU S, CHEN K, et al. 18.45% efficient multi crystalline silicon solar cells with novel nanoscale pseudo pyramid texture［J］. Advanced Functional Materials, 2014, 24(42): 6708-6716.

[11] ZHANG Li-dian, SHEN Hong-lie, YUE Zhi-hao. Preparation and property of antireflective complex structures on multicrystalline silicon surface［J］. Acta Optica Sinica, 2013, 33(6): 341-346.

[12] KUMAGAI A. Texturization using metal catalyst wet chemical etching for multicrystalline diamond wire sawn wafer［J］. Solar Energy Materials and Solar Cells, 2015, 133: 216-222.

[13] CHUNG Chun-hui, LE V N. Depth of cut per abrasive in fixed diamond wire sawing［J］. The International Journal of Advanced Manufacturing Technology, 2015, 80(5-8): 1337-1346.

[14] LI Ping, WEI Y, ZHAO Z, et al. Highly efficient industrial large-area black silicon solar cells achieved by surface nanostructured modification［J］. Applied Surface Science, 2015, 357: 1830-1835.

[15] BRANZ H M, YOST V E, WARD S, et al. Nanostructured black silicon and the optical reflectance of graded-density surfaces［J］. Applied Physics Letters, 2009, 94(23): 231121.

[16] WU Yi, GAO F, WU H, et al. The effects of Ag particle morphology on the antireflective properties of silicon textured using Ag-assisted chemical etching［J］. Journal of Alloys and Compounds, 2016, 670: 156-160.

[17] JIA Guo-bin, WESTPHALEN J, DREXLER J, et al. Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching［J］. Photonics and Nanostructures-Fundamentals and Applications, 2016, 19: 64-70.

[18] TOOR F, OH J, BRANZ H M. Efficient nanostructured ‘black’ silicon solar cell by copper catalyzed metal assisted etching［J］. Progress in Photovoltaics: Research and Applications, 2015, 23(10): 1375-1380.