[2] SCHENK H,DUERR P,KUNZE D,et al.A resonantly excited 2D-micro-scanning-mirror with large deflection [J].Sensors and Actuators A:Physical,2001,89:104-111.
[4] UREY H,DEWITT F,POWELL K D,et al.High-frequency raster pinch correction scanner for retinal scanning displays[J].Proceeding of SPIE,2001,4561:45-54.
[5] ROSCHER K U,GRATZ H,SCHENK H,et al.Low cost projection device with a 2-dimensional resonant microscanning mirror [J].Proceedings of SPIE,2004,5348:22-31.
[6] LI Z,YUAN W Z,WU M,et al.Micro scanning mirrors with laser diode for pattern generation [J].Acta Photonica Sinica,2011,40(11):32-39.
[8] NIESTEN M,MASOOD T,MILLER J,et al.Scanning laser beam displays based on a 2-D MEMS [J].Proceedings of SPIE,2010,7723:77230U1-77230U10.