In the atmosphere environment, laser combined with plasma stream technique was used to process industrially pure titanium surface, and film of titanium nitride was formed on the titanium surface. Microstructure and phase formation of the nitrided sample surface were analyzed using scanning electron microscopy (SEM) (with energy dispersive spectrometer (EDS)) and X-ray diffraction (XRD) techniques. It was found that under proper conditions, the satisfactory nitriding results were obtained. In the range of laser power density between 2.0×105 and 1.0×106 W/cm2, scanning velocity between 200 and 1000 mm/min, the nitride effect was best when laser power is 1.0×106 W/cm2 and scanning velocity is 200 mm/min.The best nitride depth of the industrially pure titanium sample was 80 μm. In the effective nitriding area, with the increasing of the depth, the nitrogen content decreased quickly, while the nitrogen content decreased slowly in the transition area.