• Optics and Precision Engineering
  • Vol. 24, Issue 7, 1557 (2016)
LIU Zhen, GAO Jin-song, LIU Hai, WANG Xiao-yi, and WANG Tong-tong
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20162407.1557 Cite this Article
    LIU Zhen, GAO Jin-song, LIU Hai, WANG Xiao-yi, WANG Tong-tong. Surface modification of 2 m RB-SiC substrate by magnetron sputtering[J]. Optics and Precision Engineering, 2016, 24(7): 1557 Copy Citation Text show less
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    CLP Journals

    [1] ZHAO Yang-yong, LIU Wei-guo, XI Ying-xue. Surface Planarization Process of RB-SiC Based on Magnetron Sputtering and ICP Etching[J]. Acta Photonica Sinica, 2018, 47(3): 324001

    [2] WEI Lei, ZHANG Lei, LI Zong-xuan, MA Dong-mei. Optimization Design and Test for Large Aspect Ratio Rectangular SiC Space Mirror[J]. Acta Photonica Sinica, 2017, 46(3): 322003

    LIU Zhen, GAO Jin-song, LIU Hai, WANG Xiao-yi, WANG Tong-tong. Surface modification of 2 m RB-SiC substrate by magnetron sputtering[J]. Optics and Precision Engineering, 2016, 24(7): 1557
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