SHI Suheng, YUE Lan, MENG Fanxin, CHEN Jiarong, REN Dasen. Effect of Oxygen Partial Pressure on The Performance of Thin-film Transistors Devices with ZTO Channel Layer Prepared by RF Sputtering[J]. Semiconductor Optoelectronics, 2023, 44(1): 92
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- Semiconductor Optoelectronics
- Vol. 44, Issue 1, 92 (2023)
Abstract
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