• Chinese Optics Letters
  • Vol. 4, Issue 10, 580 (2006)
[in Chinese] and [in Chinese]
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    [in Chinese], [in Chinese]. Scanned-cantilever atomic force microscope with large scanning range[J]. Chinese Optics Letters, 2006, 4(10): 580 Copy Citation Text show less

    Abstract

    A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100*100 (micron) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.
    [in Chinese], [in Chinese]. Scanned-cantilever atomic force microscope with large scanning range[J]. Chinese Optics Letters, 2006, 4(10): 580
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