Three-dimensional laser structuring of materials at tight focusing

Saulius Juodkazis; Koichi Nishimura; Hiroaki Misawa

Journals >Chinese Optics Letters >Volume 5 >Issue s1 >Page 198 > Article

Chinese Optics Letters
Vol. 5, Issue s1, 198 (2007)

Three-dimensional laser structuring of materials at tight focusing

Saulius Juodkazis^1、2、*, Koichi Nishimura^1、2, and Hiroaki Misawa^1、2

Author Affiliations

¹Research Institute for Electronic Science, Hokkaido University, Kita-ku, Sapporo 001-0021, Japan

²Core Research for Evolution Science and Technology (CREST), Japan Science and Technology Corporation (JST), Japan

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Saulius Juodkazis, Koichi Nishimura, Hiroaki Misawa. Three-dimensional laser structuring of materials at tight focusing[J]. Chinese Optics Letters, 2007, 5(s1): 198 Copy Citation Text

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Abstract

Pulse shaping and phase control of femtosecond pulses are shown to have effect on the dielectric breakdown of sapphire. The influence of a pulse tilt on a dielectric breakdown is demonstrated. Three-dimensional structuring of transparent dielectric and semiconducting materials at tight focusing is discussed.

Keywords

260.5210 320.2250 320.5550 220.4000

Saulius Juodkazis, Koichi Nishimura, Hiroaki Misawa. Three-dimensional laser structuring of materials at tight focusing[J]. Chinese Optics Letters, 2007, 5(s1): 198

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