• Chinese Optics Letters
  • Vol. 17, Issue 1, 011203 (2019)
Jiakun Li, Qibo Feng*, Chuanchen Bao, and Bin Zhang
Author Affiliations
  • Key Laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China
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    DOI: 10.3788/COL201917.011203 Cite this Article Set citation alerts
    Jiakun Li, Qibo Feng, Chuanchen Bao, Bin Zhang. Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis[J]. Chinese Optics Letters, 2019, 17(1): 011203 Copy Citation Text show less

    Abstract

    We report a method for simultaneously and directly measuring all six-degrees-of-freedom (six-DOF) motion errors of a rotary axis. Such a method combines the principles of laser interferometry and laser collimation measurement. One reference rotary axis and two retro-reflectors are used to achieve simultaneous sensitivity to all six errors in a full-circle measuring range. As no separation models are required, our method is capable of dynamically measuring these errors in real time and conveniently determining the origin of the errors. An automatic measuring device is built. The effectiveness of our method is experimentally demonstrated.
    εz(θ)=ΔYPSD22f2+θrefθ,(1)

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    Jiakun Li, Qibo Feng, Chuanchen Bao, Bin Zhang. Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis[J]. Chinese Optics Letters, 2019, 17(1): 011203
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