[2] Liao F J[J]. Acta Electron. Sin., 34, 513(2006).
[3] Yin S Y, Zhang H L, Yang J X, Urash I, Qian H J, Wang J O, Wang Y, Wang X X[J]. J. Electron. Inf. Technol., 33, 3040(2011).
[4] Ares Fang C S, Maloney C E[J]. J. Vac. Sci. Technol. A, 8, 2329(1990).
[5] Jones D, Mcneely D, Swanson L W[J]. Appl. Surf. Sci., 2, 232(1979).
[8] Brion D, Tonnerre J C, Shroff A M[J]. Appl. Surf. Sci., 16, 55(1983).
[11] Wang Y, Wang J, Liu W, Zhang K, Li J[J]. IEEE Trans. Electron Dev., 54, 1061(2007).
[12] Liang W L, Wang Y M, Liu W, Li H Y, Wang J S[J]. Acta Phys. Sin., 63, 057901(2014).
[13] Li Y T, Zhang H L, Liu P K, Zhang M C[J]. Acta Phys. Sin., 55, 6677(2006).
[14] Gaertner G[J]. J. Vac. Sci. Technol. B, 30, 060801(2012).
[15] Wang J, Liu W, Li L, Wang Y C, Wang Y, Zhou M[J]. IEEE Trans. Electron Dev., 56, 779(2009).
[16] Liu W, Wang Y, Wang J, Wang Y C[J]. IEEE Trans. Electron Dev., 58, 1241(2011).
[17] Meduri R, Shubankar S, Mukta J[J]. IEEE Trans. Electron Dev., 65, 2083(2018).
[18] Ryan J, Dane M, John B[J]. APL Mater., 5, 116105(2017).
[20] Yang Y, Wang Y, Liu W, Pan Z, Li J, Wang J[J]. IEEE Trans. Electron Dev., 65, 2072(2018).
[21] Gartner G, Geittner P, Raasch D, Wiechert D U[J]. Appl. Surf. Sci., 146, 22(1999).