Integrated terahertz filter is one of the basic components of integrated terahertz communication system. In order to make the terahertz filter adjustable on chip, a terahertz tunable filter based on temperature control system is proposed. Compared with other terahertz filters, the proposed tunable on chip filter has the advantages of simple tuning method and small size, and can be well integrated with other terahertz devices on the chip. The temperature of the wafer is changed by the temperature control system, and the refractive index is changed by the thermo-optical effect of the silicon material, so that the coupling state of the microloop is changed, and the resonant peak of the THZ filter is shifted. In the process of heating the heating plate from 30 ℃ to 90 ℃, the center frequency of the resonant peak near 180 GHz of the terahertz tunable filter decreases gradually from 180.453 GHz to 180.224 GHz with a range of 0.229 GHz, the resonant depth changes gradually from -68 dB to -44 dB, and the half-height width changes gradually from the original 0.04 GHz to 0.246 GHz.