[2] RAUSCH P, VERPOORT S, WITTROCK U. Unimorph deformable mirror for space telescopes: environmental testing[J]. Optical Express, 2016, 24(2): 1528-1542.
[4] BRUCHMANN C, APPELFELDER M, BECKERT E, et al. Thermo-mechanical properties of a deformable mirror with screen printed actuator[C]. SPIE, 2012, 8253: 82530D.
[5] LEE J H, LEE Y C, KANG E C. A cooled deformable bimorph mirror for a high power laser[J]. Optical Society of Korea, 2006, 10(2): 57-62.
[6] OYA S, BOUVIER A, GUYON O, et al. Performance of the deformable mirror for Subaru LGSAO[C]. SPIE, 2006, 6272: U1573-U1580.
[7] MASSA J S, PATERSON C. Development of Low Cost Deformable bimorph mirrors for use in adaptive optics[C]. SPIE, 2006, 6018: 101-106.
[8] RODRIGUES G, BASTAITS R, ROOSE S Y, et al. Modular bimorph mirrors for adaptive optics[J]. Optical Engineering, 2009, 48(3): 034001.
[9] YU Ning, JIANG Wen-han, LING Ning, et al. Response function calculation and sensitivity comparison analysis of various bimorph deformable mirrors[J]. Optical Express, 2007, 15(19): 12030-12038.
[10] BOULET C, GRIFFITH M, LAYCOCK C, et al. Development of a small aperture bimorph deformable mirror for a free-space optical communications system[C]. SPIE, 2010, 7833: 78330D.
[11] REINLEIN C, APPELFELDER M, GEBHARDT S, et al. Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror[J]. Journal of Micro/ Nanolithography Mems & Moems, 2013, 12(1): 013016.
[12] MA Jian-qiang, LIU Ying, HE Ting, et al. Double drive modes unimorph deformable mirror for low-cost adaptive optics[J]. Applied Optics, 2011, 50(29): 5647-5654.
[13] RENAUD B, DAVID A, MIHAITA H, et al. Segmented bimorph mirrors for adaptive optics: segment design and experiment[J]. Applied Optics, 2014, 53(29): 6635-6642.
[14] DAVID A H, HYUNKYU P, SOPHIE P L, et al. Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry[J]. Sensors and Actuators A, 2007, 134: 221-230.
[15] ZHOU Chao, YI Yun, WANG An-ding, et al. Concept and modeling analysis of a high fidelity multimode deformable mirror[J]. Applied Optics, 2015, 54(17): 5436-5443.
[16] VERPOORT S , WITTROCK U . Actuator patterns for unimorph and bimorph deformable mirrors[J]. Applied Optics, 2010, 49(31): G37-G46.
[17] PENG Jia-qi, Hu Xiao-chuan, CHEN Li-xia, et al. Influence of structural parameters of deformable mirror on phase characteristics of high power laser[J]. Acta Optica Sinca, 2015, 35(5): 208-215.
[18] CHEN Kai, CEHN Jun-jie, MAO Yu-xin, et al. Simulation and experiment of 214-element unimorph deformable mirror with edge-driven[J]. Acta Photonica Sinica, 2016, 45(8): 0822004.
[20] MATHIS A, COURVOISIER F, FROEHLY L, et al. Micromachining along a curve: femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams[J]. Applied Physics Letters 2012, 101(7): 071110.
[21] POLYNKIN P, KOLESIK M, MOLONEY J V, et al. Curved plasma channel generation using ultraintense airy beams[J]. Science, 2009, 324 (5924): 229-232.
[22] MA Jian-qiang, LI Yan, Yu Qi-zhi, et al. Generation of high-quality tunable Airy beams with an adaptive deformable mirror[J]. Optical Letters, 2018, 43(15): 3634-3637.