• Acta Photonica Sinica
  • Vol. 40, Issue 10, 1505 (2011)
TIAN Jia-tong1、*, FENG Shi-meng1, WANG Kun-xia1, Xu Hua-tian1, YANG Shu-quan2, LIU feng2, HUANG Jian-hua3, and PEI Jun4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • show less
    DOI: 10.3788/gzxb20114010.1505 Cite this Article
    TIAN Jia-tong, FENG Shi-meng, WANG Kun-xia, Xu Hua-tian, YANG Shu-quan, LIU feng, HUANG Jian-hua, PEI Jun. Formation Process of Pyramids on Single Crystal Si Surface[J]. Acta Photonica Sinica, 2011, 40(10): 1505 Copy Citation Text show less

    Abstract

    The texturing process with alkaline solution added a new additive on single-crystal silicon surface was discussed.At different times,alkaline solution added a new additive was used to etch the Si wafers,and samples were scanned by scanning electron microscopy.The results show that there are a few different size pyramids and smooth regions in large-area on the Si surface after etching 10 min; after etching 15 min,the sizes of pyramids become uniform,and the areas of smooth regions will reduce; after etching 20 min,the etched surface is covered with the 2~4 μm of pyramids,and the distribution is more uniformly-densely; after etching 25 min,the sizes of pyramids increase again in the over-etching process.The experiments illustrate that the new additive can effectively reduce the texturing time,make an ideal textured structure,and be applied in industry.
    TIAN Jia-tong, FENG Shi-meng, WANG Kun-xia, Xu Hua-tian, YANG Shu-quan, LIU feng, HUANG Jian-hua, PEI Jun. Formation Process of Pyramids on Single Crystal Si Surface[J]. Acta Photonica Sinica, 2011, 40(10): 1505
    Download Citation