Diffraction Analysis on Deep-etch Continuous Phase Relief Microoptical Elements

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 23 >Issue 9 >Page 819 > Article

Chinese Journal of Lasers
Vol. 23, Issue 9, 819 (1996)

Diffraction Analysis on Deep-etch Continuous Phase Relief Microoptical Elements

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Diffraction Analysis on Deep-etch Continuous Phase Relief Microoptical Elements[J]. Chinese Journal of Lasers, 1996, 23(9): 819 Copy Citation Text

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Abstract

This paper discusses the diffractive characteristics of the deep-etch continuousphase relief microoptical elements. The preliminary results about the ralationship betweenthe profiles of the deep-etch elements and the diffraction efficiency are presented. This mayprovide useful guidance for the fabrication of the elements.

Keywords

continuous phase diffractive optics elements microoptics deep-etch

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