• Optoelectronics Letters
  • Vol. 13, Issue 4, 295 (2017)
Jian-xu SUN1, Wei MI1、*, De-shuang ZHANG1, Zheng-chun YANG1, Kai-liang ZHANG1, Ye-mei HAN1, Yu-jie YUAN1, Jin-shi ZHAO1, and Bo LI2
Author Affiliations
  • 1Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Electronics Information Engineering,Tianjin University of Technology, Tianjin 300384, China
  • 2Research and Development Center of Silicon Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China
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    DOI: 10.1007/s11801-017-7065-y Cite this Article
    SUN Jian-xu, MI Wei, ZHANG De-shuang, YANG Zheng-chun, ZHANG Kai-liang, HAN Ye-mei, YUAN Yu-jie, ZHAO Jin-shi, LI Bo. Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering[J]. Optoelectronics Letters, 2017, 13(4): 295 Copy Citation Text show less
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    SUN Jian-xu, MI Wei, ZHANG De-shuang, YANG Zheng-chun, ZHANG Kai-liang, HAN Ye-mei, YUAN Yu-jie, ZHAO Jin-shi, LI Bo. Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering[J]. Optoelectronics Letters, 2017, 13(4): 295
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