• Chinese Optics Letters
  • Vol. 2, Issue 6, 06328 (2004)
Dailin Li*, Xiangzhao Wang, and Yingming Liu
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    Dailin Li, Xiangzhao Wang, Yingming Liu. Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates[J]. Chinese Optics Letters, 2004, 2(6): 06328 Copy Citation Text show less

    Abstract

    A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly. The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.
    Dailin Li, Xiangzhao Wang, Yingming Liu. Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates[J]. Chinese Optics Letters, 2004, 2(6): 06328
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