Dynamic characteristic of NEM switch based on molecular dynamic simulation

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 15 >Issue 9 >Page 1371 > Article

Optics and Precision Engineering
Vol. 15, Issue 9, 1371 (2007)

Dynamic characteristic of NEM switch based on molecular dynamic simulation

¹, ¹, ², and ¹

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic characteristic of NEM switch based on molecular dynamic simulation[J]. Optics and Precision Engineering, 2007, 15(9): 1371 Copy Citation Text

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References

[10] YASUMURA K Y,STOWE T D,CHOW E M,et al..Quality factors in micro and submicron-thick cantilevers[J].Journal of Micro electromechanical Sytems,2000,9(1):117-125.

[11] DEQUESNES M,TANG ZH,ALURU N R.Static and dynamic analysis of carbon nanotube-based switches[J].Journal of Engineering Materials and Technology,2004,126:230-237.

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic characteristic of NEM switch based on molecular dynamic simulation[J]. Optics and Precision Engineering, 2007, 15(9): 1371

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