[1] Fan Zhengxiu. Development and recent progress of optical thin films［J］. Acta Optica Sinica, 2011, 31(9): 0900131.

[2] Zhuang Qiuhui, Liu Guojun, Fu Xiuhua, et al. Design and fabrication of a depolarizing beam splitter working in band from near-infrared［J］. Acta Optica Sinica, 2016, 36(11): 1131001.

[3] Li Daqi, Yu Tianyan, Chen Gang, et al. Design and fabrication: Phase modulated antireflection coatings in 0.55-0.85 μm waveband［J］. Acta Optica Sinica, 2016, 36(7): 0731001.

[4] Xu Jian, Lu Min, Zhu Lina, et al. Progress of preparation techniques and thickness measurements of nano-scale thin films［J］. Modern Instruments, 2012, 18(3): 11-15.

[5] Huang Jiangtao, Gu Kunming, Mao Fei, et al. Preparation and characterization of multilayered titanium/titanium-diamond-like carbon films［J］. Acta Physica Sinica, 2012, 61(8): 088102.

[6] Zhuang Lingping, Zhang Xiongjun, Zhang jun, et al. Study of repetition-rate electro-optic switch based on transparent conductive films［J］. Laser & Optoelectronics Progress, 2016, 53(1): 012303.

[7] Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to minimize the characterization deviation of optical parameters of thin films caused by ellipsometric measurement systematic errors［J］. Acta Optica Sinica, 2012, 32(6): 0631001.

[8] Cui Jianjun, Gao Sitian. Nanometer film thickness metrology and traceability based on grazing incidence X-ray reflectometry［J］. Acta Physica Sinica, 2014, 63(8): 060601.

[9] Ma Yibo, Wang Meiling, Wang Hai, et al. Thickness calculation of silicon dioxide nano-films based on GIXRR reflectivity curve［J］. Spectroscopy and Spectral Analysis, 2016, 36(10): 3265-3268.

[10] Wu Bin, Hu Ming, Hou Shunbao, et al. Preparation and characteristic of phase transition vanadium oxide thin films by rapid thermal process［J］. Acta Physica Sinica, 2012, 61(18): 188101.

[11] Li Jiang, Tang Jingyou, Pei Wang, et al. Accurate determination of optical constants of amorphous absorbing thin films by spectroscopic ellipsometry［J］. Acta Physica Sinica, 2015, 64(11): 110702.

[12] Kamineni V K, Diebold A C. Overview of optical metrology of advanced semiconductor materials［C］//Aip Conference Proceedings, 2011, 1395(1): 33-40.

[13] Yu Bo. Structural characterization of Mo/Si multilayer by grazing incidence X-ray diffraction［J］. Chinese Optics, 2010, 3(6): 623-629.

[14] Nolot E, André A. Systematic combination of X-ray reflectometry and spectroscopic ellipsometry: A powerful technique for reliable in-fab metrology［J］. Thin Solid Films, 2011, 519(9): 2782-2786.

[15] Fuertes M C, Barrera M P, Plá J. Sorption and optical properties of sol-gel thin films measured by X-ray reflectometry and ellipsometric porosimetry［J］. Thin Solid Films, 2012, 520(15): 4853-4862.

[16] Chen Kai, Cui Mingqi, Zheng Lei, et al. Layer thickness measurement of super thin films［J］. High Power Laser and Particle Beams, 2008, 20(2): 234-238.

[17] Zhang Chao, Zhang Jierui, Wang Yiming, et al. Design of broad-angle extreme ultraviolet multilayer coatings based on quantum evolutionary algorithm［J］. Acta Optica Sinica, 2017, 37(6): 0631001.

[18] Yakshin A E, Kozhevnikov I V, Zoethout E, et al. Properties of broadband depth-graded multilayer mirrors for EUV optical systems［J］. Optics Express, 2010, 18(7): 6957-6971.

[19] Ulyanenkov A, Omote K, Harada J. The genetic algorithm: Refinement of X-ray reflectivity data from multilayers and thin films［J］. Physica B, 2000, 283(1): 237-241.

[20] Dane A D, Veldhuis A, Boer D K G D, et al. Application of genetic algorithms for characterization of thin layered materials by glancing incidence X-ray［J］. Physica B, 1998, 253(3/4): 254-268.

[21] Yang Shuyuan, Jiao Licheng, Liu Fang. The quantum evolutionary algorithm［J］. Chinese Journal of Engineering Mathematics, 2006, 23(2): 236-246.

[22] Wang L X, Kowk S K, Ip W H. Design of an improved quantum-inspired evolutionary algorithm for a transportation problem in logistics systems［J］. Journal of Intelligent Manufacturing, 2012, 23(6): 2227-2236.

[23] Zhang G X. Quantum-inspired evolutionary algorithms: A survey and empirical study［J］. Journal of Heuristics, 2011, 17(3): 303-351.

[24] Henke B L, Gullikson E M, Davis J C. X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E=50-30,000 eV, Z=1-92［J］. Atomic Data and Nuclear Data Tables, 1993, 54(2): 181-342.

[25] Han K H, Kim J H. Genetic quantum algorithm and it′s application to combinatorial optimization problem［Z/OL］. ［2017-03-20］. http://ieeexplore.ieee.org/stamp/stamp.jsp arnumber=870809.

[26] Wang Zhurong, Yang Bo, Lü Xingzhao, et al. An improved quantum genetic algorithm［J］. Journal of Xi′an University of Technology, 2012, 28(2): 145-151.

[27] Yang Shuyuan, Liu Fang, Jiao Licheng. The quantum evolutionary strategies［J］. Acta Electronica Sinica, 2001, 29(12A): 1873-1877.