Volatile organic compounds (VOCs), which participate in photochemical reactions and come from a variety of sources, are main precursor of photochemical pollution, and also the critical pollutants that currently affect Chinese urban air quality. Multi-point source, plane source and unorganized emissions source of industrial production process are significant sources of them. The pollution situation is complex and has many unknown factors, so the convenient and fast monitoring measurement is lacking. The technology of solar occultation flux based on FTIR(SOF-FTIR)is used, which takes advantage of infrared radiation of direct sunlight, rapid scanning factory pollution area and real-time monitoring. This method with convenient operation and high maneuverability, can be used to analyze multicomponent samples with low concentration. Experimental analysis indicates that, this method can monitor the VOCs emission of chemical plant, give out its time and space distribution features rapidly, which will provide effective data support for environmental decision-making.