• Chinese Optics Letters
  • Vol. 13, Issue s1, S12203 (2015)
Zhiyu Zhang1, Yang Xu2, and Binzhi Zhang1
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China
  • 2Jilin University, Changchun 130025, China
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    DOI: 10.3788/col201513.s12203 Cite this Article Set citation alerts
    Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203 Copy Citation Text show less
    References

    [1] Y. Dai, H. Ohmori, W. Lin, H. Eto, N. Ebizuka, and K. Tsuno, Key Eng. Mater. 291–292, 121 (2005).

    [2] H. Cheng, Z. Feng, S. Lei, and Y. Wang, Mater. Manuf. Pro-cesses 20, 917 (2005).

    [3] H. Kitahara, Y. Noda, F. Yoshida, H. Nakashima, N. Shinohara, and H. Abe, J. Ceram. Soc. Jpn. 109, 602 (2001).

    [4] Zhang, J. Yu, and Z. Zhang, Proc. SPIE 2861, 296 (1996).

    [5] R. N. Wilson, Reflecting Telescope Optics II: Manufacture, Testing, Alignment, Modern Techniques (Springer-Verlag, 2002).

    [6] X. Tonnellier, P. Morantz, P. Shore, and P. Comley, Proc. SPIE 7739, 773905 (2010).

    [7] L. Fedorenko, A. Medvid, M. Yusupov, V. Yukhimchuck, S. Krylyuk, and A. Evtukh, Appl. Surf. Sci. 254, 2031 (2008).

    [8] T. Wernicke, O. Kruger, M. Herms, J. Wurfl, H. Kirmse, W. Neumann, T. Behm, G. Irmer, and G. Trankle, Appl. Surf. Sci. 253, 8008 (2007).

    [9] S. Zoppel, M. Farsari, and R. Merz, Microelectron. Eng. 83, 1400 (2006).

    [10] H. Suzuki, S. Kodera, S. Maekawa, N. Morita, E. Sakurai, and K. Tanaka, Int. J. Jpn. Soc. Precis. Eng. 64, 619 (1998).

    [11] Y. E. Tohme, Proc. SPIE 6462, 64620K (2007).

    [12] Q. Wang, W. Cong, Z. Pei, H. Gao, and R. Kang, J. Manuf. Process. 11, 66 (2009).

    [13] Y. Wu, S. Yokoyama, T. Sato, W. Lin, and T. Tachibana, Int. J. Mach. Tool Manuf. 49, 933 (2009).

    [14] I. Scace and G. Slack, J. Chem. Phys. 30, 1551 (1959).

    Data from CrossRef

    [1] Junqing Dong, Yongqing Hu, Song Liu, Qinghui Li. The transition of alkaline flux of ancient Chinese faience beads (1046–476 BC): a case study on the samples from Pingdingshan, Henan province. Archaeological and Anthropological Sciences, 12, 267(2020).

    Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203
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