• Acta Photonica Sinica
  • Vol. 32, Issue 8, 925 (2003)
[in Chinese]1、2, [in Chinese]1, [in Chinese]3, and [in Chinese]3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. XPS Analysis of AlGaN Film Grown by MOCVD[J]. Acta Photonica Sinica, 2003, 32(8): 925 Copy Citation Text show less
    References

    [1] Morkoc H.Nitride Semiconductors and Devices.New York:Springer,1999.295~336

    [2] Morkoc H,Carlo A D,Cingolani R.GaN-based modulation doped FETs and UVdetectors.Solid-State Electronics,2002,46:157~202

    [3] Munoz E,Monroy E,Pau J L,et al. III- nitride and UV detectors. J Phys: Condensed Matter, 2001,13:7115~7137

    [4] Kingsley C R, Whitaker T J, Wee A T S,et al. Development of chemical beam epitaxy for the deposition of gallium nitride.Materials Science and Engineering, 1995,B29:78~82

    [6] Prabhakaran K, Andersson T G, Nozawa K. Nature of native oxide on GaN surface and its reaction with Al.Appl Phys Lett,1996,69(21):3212~3214

    [7] Avila A, Montero I, Galan L,et al. Behavior of oxygen doped SiC thin films: An x-ray photoelectron spectroscopy study.J Appl Phys,2001,89(1):212~216

    [8] Sasaki T, Matsuoka T. Substrate-polarity dependence of metal-organic vapor-phase epitaxy -grown GaN on SiC.J Appl Phys,1988,64(9):4531~4535

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. XPS Analysis of AlGaN Film Grown by MOCVD[J]. Acta Photonica Sinica, 2003, 32(8): 925
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