Design of a high-precision reference spherical lens for Fizeau interferometer

QU Yi; SU Dongqi

doi:10.3969/j.issn.1005-5630.2015.06.011

Journals >Optical Instruments >Volume 37 >Issue 6 >Page 522 > Article

Optical Instruments
Vol. 37, Issue 6, 522 (2015)

Design of a high-precision reference spherical lens for Fizeau interferometer

QU Yi^* and SU Dongqi

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[in Chinese]

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DOI: 10.3969/j.issn.1005-5630.2015.06.011 Cite this Article

QU Yi, SU Dongqi. Design of a high-precision reference spherical lens for Fizeau interferometer[J]. Optical Instruments, 2015, 37(6): 522 Copy Citation Text

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Abstract

A high-precision reference spherical lens is designed. The F number of the lens is 0.82. The wavefront PV value is 0.09 λ and RMS value is 0.028 λ. The slope of wavefront is 11 μrad. We calculate the retrace error of the reference spherical lens. The maximum of retrace error is 0.29 nm. A part of surface is measured with the reference spherical lens. The results show that precision of 1 nm can be reached.

Keywords

Fizeau interferometer metrology optical design reference spherical lens

QU Yi, SU Dongqi. Design of a high-precision reference spherical lens for Fizeau interferometer[J]. Optical Instruments, 2015, 37(6): 522

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