• Optical Instruments
  • Vol. 37, Issue 6, 522 (2015)
QU Yi* and SU Dongqi
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1005-5630.2015.06.011 Cite this Article
    QU Yi, SU Dongqi. Design of a high-precision reference spherical lens for Fizeau interferometer[J]. Optical Instruments, 2015, 37(6): 522 Copy Citation Text show less

    Abstract

    A high-precision reference spherical lens is designed. The F number of the lens is 0.82. The wavefront PV value is 0.09 λ and RMS value is 0.028 λ. The slope of wavefront is 11 μrad. We calculate the retrace error of the reference spherical lens. The maximum of retrace error is 0.29 nm. A part of surface is measured with the reference spherical lens. The results show that precision of 1 nm can be reached.
    QU Yi, SU Dongqi. Design of a high-precision reference spherical lens for Fizeau interferometer[J]. Optical Instruments, 2015, 37(6): 522
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