Fig. 1. Schematic diagram and working principle diagram of HIM: (a) Schematic diagram; (b) working principle diagram.HIM整体结构及其工作原理图　(a)整体结构; (b)工作原理

Fig. 2. EBSD map and surface micrograph of tungsten: (a) EBSD map of tungsten; (b) surface micrograph of tungsten; (c) the irradiated area of tungsten.W样品的EBSD衍射花样和表面微观形貌　(a)EBSD衍射花样; (b)表面微观形貌; (c)注入区域

Fig. 3. In-situ observation of helium bubble growth during helium implantation: (a) 120 s; (b) 240 s; (c) 360 s; (d) 480 s; (e) 600 s; (f) 720 s; (g) 840 s; (h) 960 s; (i) 1080 s; (j) 1200 s; (k) 1320 s; (l) 1440 s; (m) 1560 s; (n) 1680 s; (o) 1800 s; (p) 1920 s; (q) 2040 s; (r) 2160 s.He泡生长过程的原位在线监测　(a) 120 s; (b) 240 s; (c) 360 s; (d) 480 s; (e) 600 s; (f) 720 s; (g) 840 s; (h) 960 s; (i) 1080 s; (j) 1200 s; (k) 1320 s; (l) 1440 s; (m) 1560 s; (n) 1680 s; (o) 1800 s; (p) 1920 s; (q) 2040 s; (r) 2160 s

Fig. 4. In-situ observation of helium bubble growth during helium implantation: (a) 1100 s; (b) 1120 s; (c) 1140 s; (d) 1160 s; (e) 1180 s; (f) 1200 s; (g) 1220 s; (h) 1240 s. He泡生长过程的在线监测　(a) 1100 s; (b) 1120 s; (c) 1140 s; (d) 1160 s; (e) 1180 s; (f) 1200 s; (g) 1220 s; (h) 1240 s

Fig. 5. In-situ observation of helium bubble growth during helium implantation: (a) 120 s; (b) 240 s; (c) 360 s; (d) 480 s; (e) 600 s; (f) 720 s; (g) 840 s; (h) 960 s.He泡生长过程的在线监测　(a) 120 s; (b) 240 s; (c) 360 s; (d) 480 s; (e) 600 s; (f) 720 s; (g) 840 s; (h) 960 s

Fig. 6. Measurement of the helium bubble and crack size: (a) Helium bubble; (b) crack.He泡和裂纹的大小测量　(a)He泡; (b)裂纹

Fig. 7. Cross-section of helium bubbles microstructure.氦泡横截面微观形貌