[2] DU Y X, LU Q J, LIU M D. Structure and application of five-axis linkage CNC machine ［J］. Machine Building & Automation, 2008,37(3):14-20. (in Chinese)

[3] WANG Y Z, MA X B, CHEN L J. Realization methodology of a 5-axis spline interpolator in an open CNC system ［J］. Chinese Journal of Aeronautics, 2007,20(4):362-369.

[4] ANOTAIPAIBOON W, MAKHANOV S. Curvilinear space-filling curves for five-axis machining ［J］. Computer-Aided Desigh, 2008,40(3):350-367.

[5] ZHANG D L, ZHOU L S. Intelligent NURBS interpolator based on the adaptive feedrate control ［J］. Chinese Journal of Aeronautics, 2007,20(5):469-474.

[6] YOU Y P, WANG M, ZHU J Y. An interpolator for NURBS curve machining with high-speed and high accuracy ［J］. Journal of Computer-aided Design and Computer Graphics, 2001,13(10):943- 947.

[7] LANGERON J M, DUC E, LARTIGUE C. A new format for 5-axis tool path computation, using Bspline curves ［J］. Computer-Aided Desigh, 2004,36(12):1219-1229.

[8] CHEN L J, WANG Y Z, FU H Y. Study on generation and interpolation methodology of five-axis coordinated Bi-NURBS curve ［J］. Machinery, 2006,44(1):67-70. (in Chinese)

[9] FLEISIG R V, SPENCE A D. A constant feed and reduced angular acceleration interpolation algorithm for multi-axis machining［J］. Computer-Aided Desigh, 2001,33(1):1-15.

[10] JIE D G, LIU Y J, SUN L N. Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism ［J］. Opt. Precision Eng., 2005,13(2):171-178. (in Chinese)

[11] ZHANG W B, FAN D P, ZHU W H. Internal model control for electro-optical tracking servo system based on sampled-data control theory ［J］. Opt. Precision Eng., 2008,16(2):221-228. (in Chinese)

[12] JIN ZH L, LI Y B. Kinematic transmission property of a novel 3-P-2SS spherical platform manipulator ［J］. Opt. Precision Eng., 2006,14(4):658-661. (in Chinese)

[13] ZHANG X F, SUN L N. Research of precise parallels robot control method and system ［J］. Chinese Journal of Mechanical Engineering, 2004,40(4):177-180. (in Chinese)

[14] SHAO ZH X, ZHANG Q CH, BAI Q SH. Design method of controlling device for tiling high precision and large aperture grating ［J］. Opt. Precision Eng., 2009,17(1):158-165. (in Chinese)

[15] WANG Y Y, ZHAO X Z. Inverse control algorithm to compensate the hysteresis and creep effect of piezoceramic ［J］. Opt. Precision Eng., 2006,14(6):1032-1040. (in Chinese)

[16] FAN W, YU X F, XI L. Research on driving system and controlling means of PZT ［J］. Opt. Precision Eng., 2007,15(3):368-371. (in Chinese)