Femtosecond Laser Dual-Mode Rapid Fabrication Based on Spatial Light Modulator

Wu Peichao; Zhang Chenchu; Yang Liang; Li Jiawen; Hu Yanlei; Wu Dong

doi:10.3788/cjl201845.1001005

[1] Fischer J, Wegener M. Three-dimensional optical laser lithography beyond the diffraction limit[J]. Laser & Photonics Reviews, 7, 22-44(2012). http://onlinelibrary.wiley.com/doi/10.1002/lpor.201100046/full

[2] Wu D, Chen Q D, Niu L G et al. Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices[J]. Lab on a Chip, 9, 2391-2394(2009).

[3] Lin C L, Wang I, Dollet B et al. Velocimetry microsensors driven by linearly polarized optical tweezers[J]. Optics Letters, 31, 329-331(2006). http://www.ncbi.nlm.nih.gov/pubmed/16480198

[4] Chen Q D, Wu D, Niu L G et al. Phase lenses and mirrors created by laser micronanofabrication via two-photon photopolymerization[J]. Applied Physics Letters, 91, 171105(2007).

[5] Cao X W, Zhang L, Yu Y S et al. Application of micro-optical components fabricated with femtosecond laser[J]. Chinese Journal of Lasers, 44, 0102004(2017).

[6] Wang J, Xia H, Xu B B et al. Remote manipulation of micronanomachines containing magnetic nanoparticles[J]. Optics Letters, 34, 581-583(2009). http://www.ncbi.nlm.nih.gov/pubmed/19252558

[7] Kawata S, Sun H B, Tanaka T et al. Finer features for functional microdevices[J]. Nature, 412, 697-698(2001). http://onlinelibrary.wiley.com/resolve/reference/PMED?id=11507627

[8] Wu D, Wu S Z, Niu L G et al. High numerical aperture microlens arrays of close packing[J]. Applied Physics Letters, 97, 031109(2010). http://scitation.aip.org/content/aip/journal/apl/97/3/10.1063/1.3464979

[9] Sun H B, Kawata S. Two-photon laser precision microfabrication and its applications to micro-nano devices and systems[J]. Journal of Lightwave Technology, 21, 624-633(2003).

[10] Lim T W, Son Y, Jeong Y J et al. Three-dimensionally crossing manifold micro-mixer for fast mixing in a short channel length[J]. Lab on a Chip, 11, 100-103(2011). http://europepmc.org/abstract/MED/20938497

[11] Wang J, He Y, Xia H et al. Embellishment of microfluidic devices via femtosecond laser micronanofabrication for chip functionalization[J]. Lab on a Chip, 10, 1993-1996(2010).

[12] Chong T C, Hong M H, Shi L P. Laser precision engineering: From microfabrication to nanoprocessing[J]. Laser & Photonics Reviews, 4, 123-143(2010). http://ieeexplore.ieee.org/document/4571558/

[13] Gittard S D, Nguyen A, Obata K et al. Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator[J]. Biomedical Optics Express, 2, 3167-3178(2011).

[14] Kelemen L, Valkai S, Ormos P. Parallel photopolymerisation with complex light patterns generated by diffractive optical elements[J]. Optics Express, 15, 14488-14497(2007).

[15] Xu B, Du W Q, Li J W et al. High efficiency integration of three-dimensional functional microdevices inside a microfluidic chip by using femtosecond laser multifoci parallel microfabrication[J]. Scientific Reports, 6, 19989(2016).

[16] Matsuo S, Juodkazis S, Misawa H. Femtosecond laser microfabrication of periodic structures using a microlens array[J]. Applied Physics A, 80, 683-685(2005). http://link.springer.com/article/10.1007/s00339-004-3108-x

[17] Kato J, Takeyasu N, Adachi Y et al. Multiple-spot parallel processing for laser micronanofabrication[J]. Applied Physics Letters, 86, 044102(2005). http://scitation.aip.org/content/aip/journal/apl/86/4/10.1063/1.1855404

[18] Sakakura M, Sawano T, Shimotsuma Y et al. Fabrication of three-dimensional 1×4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam[J]. Optics Express, 18, 12136-12143(2010).

[19] Jenness N J, Wulff K D, Johannes M S et al. Three-dimensional parallel holographic micropatterning using a spatial light modulator[J]. Optics Express, 16, 15942-15948(2008). http://www.opticsinfobase.org/abstract.cfm?uri=oe-16-20-15942

[20] Lin H, Gu M. Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam[J]. Applied Physics Letters, 102, 084103(2013). http://scitation.aip.org/content/aip/journal/apl/102/8/10.1063/1.4794030

[21] Zhang S J, Li Y, Liu Z P et al. Two-photon polymerization of a three dimensional structure using beams with orbital angular momentum[J]. Applied Physics Letters, 105, 061101(2014).

[22] Wang A D, Jiang L, Li X W. et al. Mask-free patterning of high-conductivity metal nanowires in open air by spatially modulated femtosecond laser pulses[J]. Advanced Materials, 27, 6238-6243(2015).

[23] Ni J C, Wang C W, Zhang C C et al. Three-dimensional chiral microstructures fabricated by structured optical vortices in isotropic material[J]. Light: Science & Applications, 6, e17011(2017).

[24] Yang L, Qian D D, Xin C et al. Two-photon polymerization of microstructures by a non-diffraction multifoci pattern generated from a superposed Bessel beam[J]. Optics Letters, 42, 743-746(2017).

[25] Zhang C C, Hu Y L, Li J W et al. A rapid two-photon fabrication of tube array using an annular Fresnel lens[J]. Optics Express, 22, 3983-3990(2014). http://www.ncbi.nlm.nih.gov/pubmed/24663719

[26] Liu L P, Zhang S J, Yang H et al. Fabrication of double-helix microstructures by two-photon polymerization[J]. Chinese Journal of Lasers, 44, 0102006(2017).

[27] Weiner A M. Femtosecond pulse shaping using spatial light modulators[J]. Review of Scientific Instruments, 71, 1929-1960(2000). http://scitation.aip.org/content/aip/journal/rsi/71/5/10.1063/1.1150614

[28] Di Leonardo R, Ianni F, Ruocco G. Computer generation of optimal holograms for optical trap arrays[J]. Optics Express, 15, 1913-1922(2007). http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=VIRT02000013000005000142000001&idtype=cvips&gifs=Yes

[29] Zhang C C, Hu Y L, Li J W et al. An improved multi-exposure approach for high quality holographic femtosecond laser patterning[J]. Applied Physics Letters, 105, 221104(2014). http://scitation.aip.org/content/aip/journal/apl/105/22/10.1063/1.4902925