[1] Arriaga Z L a J. High Quality Porous Silicon Multilayer Structures for Infrared Applications[D]. Sweden:In PIERS Proceedings, 2013:1404-1408.

[2] Lammel G , Schweizer S, Renaud P. MEMS infrared gas spectrometer based on a porous Silicon tunable filter[J]. IEEE, 2001:578-581.

[3] Lammel G, Schweizer S, Renaud Ph. Microspectrometer based on a tunable optical filter of porous silicon[J]. Sensors and Actuators A, 2001(92):52-59.

[6] Kordás K, Beke S, Beke A E. Optical properties of porous silicon[J]. Optical Materials,2004, 25(3):257-260.

[8] Foss S E. Graded Optical Filters in Porous Silicon for use in MOEMS Applications[D]. Norway: University of Oslo, 2005.

[9] Smith R L, Collins S D. Porous silicon formation mechanisms[J]. Journal of Applied Physics, 1992,71(8).

[10] Smith R L , Collins S D. A theoretical model of the formation morphologies of porous Silicon[J]. Journal of Electronic Meterials,1988,17(6):533-541.

[11] Weinberg N L , Weinberg H R. Electrochemical oxidation of organic compounds[J]. Chemical Reviews,1968,68(4):449-523.