In this paper, the coating samples are deposited by reactive electron-beam deposition using the materials of HfO2/SiO2, ZrO2/SiO2, (ZrO2+Y2O3)/SiO2 and Ta2O5/SiO2 respectively, for high power laser, the study of laser conditioning effect of oxide multilayer mirror was taken by using N-on-1 mode. The experiment results show that the different materials mirror have different laser conditioning effect. The HfO2/SiO2 coating is best for improvement of damage threshold, up to 3 times. The ZrO2/SiO2 and (Ζr?2+Y2O3)/SiO2 is better, up to 1.5 times. But for Ta2O5/SiO2, the laser conditioning has almostly not effect on threshold improvement. Especially for HfO2/SiO2 mirror laser conditioning, the mechanisms are found to be two kinds of situation (state), laser annealing and laser clean of coating. The experiment of damage size and degree influencing on its spectrum shows that the damage of scald less than 200 μm and pit have almostly not influence on their reflectivity, for the damage diameter larger than 500 μm scald and delaminate, the reflectivity of coating drop less than 10%, so for HR coating it is better that the damage threshold is determined by practical application, not only by laser damage simply.