Jinsong PENG, Jianbing YANG, Zhao YIN, Zengfeng WANG, Qi SONG, Yan WU. Preparation of Monochrome Micro LED Microdisplay Chip Based on 200 mm Silicon‑based GaN and Analysis of its Batch Production Difficulties[J]. Optoelectronic Technology, 2023, 43(2): 129
- Optoelectronic Technology
- Vol. 43, Issue 2, 129 (2023)
Fig. 1. Process flow diagram of Micro LED microdisplay chip
Fig. 2. Profile schematic of Micro LED microdisplay array
Fig. 3. Topography of Micro LED microdisplay pixel array
Fig. 4. I‑V characteristics of Micro LED microdisplay array
Fig. 5. I‑L characteristics of Micro LED microdisplay array
Fig. 6. Display pictures of Micro LED microdisplay array
Fig. 7. Display defects of Micro LED microdisplay chip
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Table 1. Main defects and improving measurements
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