• Opto-Electronic Engineering
  • Vol. 41, Issue 10, 88 (2014)
ZHAO Guolei1、*, GUO Feng1, LIU Haichao1, and HONG Jenghaur2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2014.10.015 Cite this Article
    ZHAO Guolei, GUO Feng, LIU Haichao, HONG Jenghaur. Dichromatic Interference Intensity Modulation Approach for Thin Lubricating Film Thickness Measurement[J]. Opto-Electronic Engineering, 2014, 41(10): 88 Copy Citation Text show less

    Abstract

    Optical interferometry is an effective way for lubricating film thickness measurement. The dichromatic interferometry can avoid artificial fringe order counting, while operates with a fair resolution and a large film thickness measurement range. However, the traditional dichromatic interferometry depends on strict calibration processes and the observer. In this paper, a dichromatic interference intensity modulation approach is proposed for micro/nano lubricating film thickness measurement, whereby linear superposition of the intensities of the red and the green components is carried out and a modulated signal is obtained to infer the film thickness at its local maximum/minimum. Thereafter the film thickness of other points can be obtained by the interference intensity of the red or green light. To validate this approach,contact gap between a steel ball and a glass disc was measured, and the results were well correlated with the theoretical calculation. A measurement range of 2 μm can be achieved by an optimum selection of the wavelengths of the red and green lights.
    ZHAO Guolei, GUO Feng, LIU Haichao, HONG Jenghaur. Dichromatic Interference Intensity Modulation Approach for Thin Lubricating Film Thickness Measurement[J]. Opto-Electronic Engineering, 2014, 41(10): 88
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