• Opto-Electronic Engineering
  • Vol. 49, Issue 2, 210389-1 (2022)
Chao Zhang, Min Li, Baichen Ye, Jianying Wu, Zhi Wang, and Xiaowei Li*
Author Affiliations
  • Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
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    DOI: 10.12086/oee.2022.210389 Cite this Article
    Chao Zhang, Min Li, Baichen Ye, Jianying Wu, Zhi Wang, Xiaowei Li. Electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser[J]. Opto-Electronic Engineering, 2022, 49(2): 210389-1 Copy Citation Text show less

    Abstract

    As a common structure, microholes are widely used in various fields, including biomedical, aerospace, 3D packaging and so on. Femtosecond laser has unique advantages in drilling high-quality microhole due to its ultra-short pulse duration and ultra-high peak power. This review covers temporally/spatially shaped femtosecond laser microhole drilling methods and their applications over the past decade, including femtosecond laser temporally/spatially shaped methods, temporally/spatially shaped femtosecond laser microhole drilling based on electrons dynamics control, and the applications of microhole in transmittance enhancement and anti-reflection, material cutting, oil/water separation, fog collection and gas collection. Furthermore, present challenges and future research opportunities in this field are analyzed.
    Chao Zhang, Min Li, Baichen Ye, Jianying Wu, Zhi Wang, Xiaowei Li. Electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser[J]. Opto-Electronic Engineering, 2022, 49(2): 210389-1
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