• Journal of Synthetic Crystals
  • Vol. 54, Issue 2, 290 (2025)
XIE Yinfei1, HE Yang1, LIU Weiye1, XU Wenhui2..., YOU Tiangui2, OU Xin2, GUO Huaixin3 and SUN Huarui1,*|Show fewer author(s)
Author Affiliations
  • 1Ministry of Industry and Information Technology Key Laboratory of Micro-nano Optoelectronic Information System, Harbin Institute of Technology, Shenzhen, Shenzhen 518055, China
  • 2National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 3Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 211106, China
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    DOI: 10.16553/j.cnki.issn1000-985x.2024.0267 Cite this Article
    XIE Yinfei, HE Yang, LIU Weiye, XU Wenhui, YOU Tiangui, OU Xin, GUO Huaixin, SUN Huarui. Recent Progress on Thermal Management of Ultrawide Bandgap Gallium Oxide Power Devices[J]. Journal of Synthetic Crystals, 2025, 54(2): 290 Copy Citation Text show less

    Abstract

    The low thermal conductivity of ultrawide bandgap (UWBG) gallium oxide (β-Ga2O3) is the most significant bottleneck restricting the development of its power devices, posing a huge challenge for efficient heat dissipation under high-power density conditions. Therefore, developing new thermal management and packaging technologies is extremely urgent. It is crucial to alleviate the performance and reliability issues caused by self-heating through thermal management at the material, device, and packaging levels. This paper provides a timely review of the state of the art in thermal management of UWBG β-Ga2O3 power devices, discussing related challenges, potential solutions, and research opportunities. The paper firstly introduces the characteristics of UWBG β-Ga2O3 and its significance in electronic devices, and elaborates on the crucial firstly importance of thermal management in β-Ga2O3 devices. Then, various thermal management techniques, including substrate-related methods and junction-side thermal management techniques, are thoroughly examined, and their impact on the electrical properties of β-Ga2O3 devices is analyzed. Finally, the future development trends of thermal management for UWBG β-Ga2O3 devices are prospected. Multi-dimensional thermal management strategies are proposed, focusing on “material-device-packaging” electrothermal collaborative design, near junction heterogeneous integration, and novel external packaging, aiming to arouse relevant research and accelerate the development and industrialization process of UWBG β-Ga2O3 power devices.
    XIE Yinfei, HE Yang, LIU Weiye, XU Wenhui, YOU Tiangui, OU Xin, GUO Huaixin, SUN Huarui. Recent Progress on Thermal Management of Ultrawide Bandgap Gallium Oxide Power Devices[J]. Journal of Synthetic Crystals, 2025, 54(2): 290
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