YU Lei, YANG Shuang-ning, LIU Xue-qing, LI De-hui. Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components[J]. Acta Photonica Sinica, 2018, 47(12): 1214003
Abstract
Set citation alerts for the article
Please enter your email address