• Optics and Precision Engineering
  • Vol. 26, Issue 7, 1794 (2018)
SONG Wei, SONG Zhi-jie, ZHANG Ya-nan, and SHEN Lin-yong
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20182607.1794 Cite this Article
    SONG Wei, SONG Zhi-jie, ZHANG Ya-nan, SHEN Lin-yong. High-precision target pose adjustment based on 3-CCD microscope vision system[J]. Optics and Precision Engineering, 2018, 26(7): 1794 Copy Citation Text show less

    Abstract

    A 3-CCD microscope vision system is established to realize micro-target pose adjustment in a high-power laser device with high precision. Image-based visual control method is performed, and the image Jacobian matrix is derived online by using the active movement of the micro-target. The PI controller is used to adjust the micro-targets pose so that the image features are close to the objective position. In the experiments, we compare the image-based visual control method with the position-based visual control method, which was proposed in our previous research by using a 3D posture description algorithm to control the micro-target to the desired pose. The precision of target positioning and orientation error for the image-based visual control method are 0.07 μm and 0.02 μrad, respectively, whereas the precision of target positioning and orientation error values for the position-based visual control method are 0.16 μm and 0.07 μrad, respectively. The experimental results show that the image-based visual control method is robust for system errors such as kinematic and visual calibration errors. Thus, it possesses better precision and stability for target pose adjustment.
    SONG Wei, SONG Zhi-jie, ZHANG Ya-nan, SHEN Lin-yong. High-precision target pose adjustment based on 3-CCD microscope vision system[J]. Optics and Precision Engineering, 2018, 26(7): 1794
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