• Optics and Precision Engineering
  • Vol. 20, Issue 6, 1310 (2012)
ZHANG Zhao-yang*, LI Zhong-yang, WANG Yao-min, and MAO Wei-ping
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/ope.20122006.1310 Cite this Article
    ZHANG Zhao-yang, LI Zhong-yang, WANG Yao-min, MAO Wei-ping. Mechanical-electrochemical micro-etching under laser shock effect[J]. Optics and Precision Engineering, 2012, 20(6): 1310 Copy Citation Text show less
    References

    [1] PAJAK P T, DESILVA A K M, HARRISON D K, et al.. Precision and efficiency of laser assisted jet electrochemical machining[J].Precision Engineering, 2006, 30(3):288-298.

    [2] SHIN H S,PARK M S, CHU C N. Electrochemical etching using laser masking for multilayered structures on stainless steel[J]. CIRP Annals-Manufacturing Technology,2010,59:585-588.

    [3] LONG Y H,SHI T L,XIONG L C. Study on excimer laser-induced electrochemical etching metal[J]. Optical Technique,2008,34:227-230. ( in Chinese)

    [4] SEN M, SHAN H S. A review of electrochemical macro- to micro-hole drilling processes[J]. International Journal of Machine Tools and Manufacture, 2005,45(2):137-152.

    [5] DE SILVA A K M, PAJAK P T, HARRISON D K, et al.. Modelling and experimental investigation of laser assisted jet electrochemical machining[J].CIRP Annals-Manufacturing Technology, 2004,53(1):179-182.

    [6] SHOR J S, ZHANG X G, OSGOOD R M. Laser-assisted photoelectrochemical etching of n-type -SiC[J]. Journal Electrochemical Socity, 1992, v139:1213.

    [7] HUANG W H, ZHU L F, CHENG Y H, et al.. AFM based femto-second laser nanofabrication of PMMA [J] . Opt. Precision Engineering, 2007,15(12):1959-1962. (in Chinese)

    [8] LIU Y, ZENG Y B, ZHU D, et al.. Real-time control and data acquisition system for 3D micro electrochemical milling[J]. Opt. Precision Eng., 2010,18(6):1310-1318. (in Chinese)

    [9] HU Y Y, ZHU D, LI H S, et al.. Fabrication of ultra-high metal micro electrode array using UV-LIGA technology[J]. Opt. Precision Engineering,2010,18(3):670-676. (in Chinese)

    [10] XU J.Experimental study on mechanical effect of underwater workpiece with pulse laser[D]. Nanjing:Nanjing University of Science and Technology,2010.(in Chinese)

    [11] Gutman Э М.Mechanochemistry and Corrosion Prevection of Metals[M] .Peking:Science Publication, 1989.(in Chinese)

    [12] KARIMZADEH R, ANVARI J Z, MANSOUR N. Nanosecond pulsed laser ablation of silicon in liquids[J]. Applied Physics A: Materials Science and Processing,2009,94(4):949-955.

    [13] GACEK S,WANG X W. Dynamics evolution of shock waves in laser-material interaction[J]. Applied Physics A: Materials Science and Processing,2009,94(3):675-690.

    CLP Journals

    [1] KONG Quan-cun, LIU Guo-dong, LI Yong, ZHOU Kai. Preparation of hollow electrode used for micro ECM[J]. Optics and Precision Engineering, 2015, 23(10): 2810

    [2] Zhang Changtao, Zhang Zhaoyang, Cai Mingxia, Ding Wei, Mao Weiping, Xu Yulan. Effect of pulsed laser thermal shock to electro-deposition[J]. Infrared and Laser Engineering, 2015, 44(1): 65

    [3] CHENG Bai, HAN Bing, GU Li-shan, CHEN Xiao-ping, YANG Li-jun. Nanostructure machining by AFM probe combined with continuous laser[J]. Optics and Precision Engineering, 2015, 23(7): 2043

    [4] ZHONG Jin-ming, WU Xiao-yu, XU Bin, LUO Feng, LI Ji-bin, RUAN Shuang-chen. Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding[J]. Optics and Precision Engineering, 2015, 23(4): 988

    ZHANG Zhao-yang, LI Zhong-yang, WANG Yao-min, MAO Wei-ping. Mechanical-electrochemical micro-etching under laser shock effect[J]. Optics and Precision Engineering, 2012, 20(6): 1310
    Download Citation