Yanmei LUO, Zhoushuo CHU, Jian WANG, Ke HU, Botao SUN. Research Progress of a⁃IGZO TFT Based on Dual⁃active Layer[J]. Optoelectronic Technology, 2021, 41(1): 70
- Optoelectronic Technology
- Vol. 41, Issue 1, 70 (2021)
Fig. 1. Structure of dual-active layer IGZO-TFT
Fig. 2. The interaction between active layer's surface and etching medium
Fig. 3. Stucture and process of a-IGZO TFT
Fig. 4. The comparison of V th and SS with different thicknesses of IZO
Fig. 5. Schematic of V th shift of single active layer and double active layer under bias test
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Table 1. The results of PBT and NBT
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Table 2. The electrical performance of a⁃IGZO TFTs with different percentage of oxygen
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