• Journal of Infrared and Millimeter Waves
  • Vol. 31, Issue 6, 497 (2012)
YE Zhen-Hua1、*, LI Yang1、2, HU Wei-Da1, CHEN Lu1, LIAO Qin-Jun1, CHEN Hong-Lei1, LIN Chun1, HU Xiao-Ning1, DING Rui-Jun1, and HE Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3724/sp.j.1010.2012.00497 Cite this Article
    YE Zhen-Hua, LI Yang, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. Simultaneous mode MW/LW two color HgCdTe infrared detector[J]. Journal of Infrared and Millimeter Waves, 2012, 31(6): 497 Copy Citation Text show less

    Abstract

    The results of simultaneous-mode 128×128 MW/LW two-color HgCdTe Infrared detector was presented in this paper. The photoresist (PR) spray-coating technology was developed to open the windows of non-planar implantation and metallization of two-color HgCdTe infrared detector. By etching to expose the n-type implantation-region of MW photodiodes, non-planar B+-implantation of MW photodiodes and LW photodiodes synchronously, side-wall passivation, side-wall metallization and flip-chip hybridization with Readout Integrated Circuit (ROIC), 128×128 MW/LW two-color HgCdTe Infrared detector was achieved from a triple-layer p3-p2-P1 hetero-junction Hg1-xCdxTe film grown by molecular beam epitaxy. At liquid nitrogen temperature, the cut-off wavelengths of the simultaneous-mode MW/LW two-color Infrared detector were 5.1μm and 10.1 μm individually, and the peak detectivities (Dλp*) were 2.02×1011 cmHz1/2/W and 3.10×1010 cmHz1/2/W respectively. Also the spectral cross-talks of MW-to-LW and LW-to-MW were suppressed to only 3.8% and 4.4% by optimizing the chip structure of the simultaneous-mode two-color infrared detector.
    YE Zhen-Hua, LI Yang, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. Simultaneous mode MW/LW two color HgCdTe infrared detector[J]. Journal of Infrared and Millimeter Waves, 2012, 31(6): 497
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